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Mitutoyo Objectives
For information on Mitutoyo Objectives, please download PDF. |
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FS70
• Ideal as a microscope unit of a prober station for semiconductors
• FS70L supports three types of YAG laser wavelength ranges (1064nm,
532nm, 355nm)
• FS70L4 supports two types of wavelength ranges (532nm and 266nm)
• Allows for laser cutting of thin films used in semiconductors and
liquid crystals
• Brightfield, differential interference contrast (DIC) and polarized
observations standard with FS70Z
• FS70ZD supports darkfield observation
• Inward revolving nosepiece for long working distance objectives
• Ergonomic design
• Erect-image optical system
• Enlarged fine focus adjustment wheel with rubber grip coarse
adjustment knob |
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FS110
• Brightfield/darkfield mask inspection microscope
• Accepts all Mitutoyo ultra long working distance optics
• Reflected light only or transmitted/reflected light stand
• Large stable base and frame
• Plan apochromat infinity corrected strain free optics
• Ultra long working distance objectives
• Two trinocular body tube design available
• Accepts differential interference contrast (DIC) accessories
• Slot in lamphouse mount for various filters
• Several sizes of wafer mask holders
• Selectable power input
• Quarts halogen illumination
• Optional brightfield/darkfield illumination |
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FS300
• Controls designed for ease of use
• Improved eyelevel lens for fatigue free use
• Newly developed 300mm cross-travel stage
• One-body frame with high-rigidity and high vibration-resistance for
high-magnification observation
• Super-wide field of view eyepieces
• Equipped with the double-sliding mechanism for both bright-field and
dark-field observations
• Unique optical system offers a clear image without flaring
• Popular long working distance objective lenses
• Reflected and transmitted illumination – Koehler illumination |
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MF-A/MF-UA
• Measuring microscope
• Body with high-rigidity
• Eyepieces with a widefield of view
• Light focus system
• Digital readout of 0.001mm
• Longest measuring stroke
• Quick release system and high accuracy digital scales
• Brightfield observation, clear and flareless erect image
• Long working distance objectives
• Infinity correction optical system, same as FS series
• Bright/dark-field observations, polarized observation and DIC
• Focus and measure using fine/coarse movement handle
• Built in x and y axis zeroset switches
• Inward type revolver with 4 lens mount |
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VM-ZOOM
• High zoom function
• Ideal for a prober station for semiconductors
• Equipped with the built in zoom lens with a magnification of 0.25x-10x
• Special high N.A. objective
• Offers continuous image of 100-4000x on a 15 inch monitor
• 10 models to choose from
• Equipped with a unique sliding revolver
• NIR/NUV/UV objectives available
• Customized specs such as polarization and DIC observations available
• See PDF for more details. |
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